Effect of the implantation temperature on lattice damage of Be +-implanted GaN
- Pastor, D.
- Cuscó, R.
- Artús, L.
- González-Díaz, G.
- Fernández, S.
- Calleja, E.
ISSN: 0268-1242
Year of publication: 2005
Volume: 20
Issue: 5
Pages: 374-377
Type: Article