Rie-induced damage in MOS structures

  1. de Dios, A.
  2. Castán, E.
  3. Bailón, L.
  4. Barbolla, J.
  5. Lozano, M.
  6. Lora-Tamayo, E.
Journal:
Solid State Electronics

ISSN: 0038-1101

Year of publication: 1990

Volume: 33

Issue: 11

Pages: 1419-1423

Type: Article

DOI: 10.1016/0038-1101(90)90116-V GOOGLE SCHOLAR