Raman microprobe: a diagnostic tool for processed silicon. Analysis of microindented silicon
- Jiménez, J.
- Martín, E.
- Torres, A.
- Martín, B.
- Rull, F.
- Sobrón, F.
ISSN: 0957-4522, 1573-482X
Year of publication: 1993
Volume: 4
Issue: 4
Pages: 271-277
Type: Article