Computer simulation of point-defect distributions generated by ion implantation

  1. Jaraíz, M.
  2. Arias, J.
  3. Rubio, J.E.
  4. Bailón, L.A.
  5. Barbolla, J.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1993

Volume: 80-81

Issue: PART 1

Pages: 172-175

Type: Article

DOI: 10.1016/0168-583X(93)96100-Q GOOGLE SCHOLAR
Data source: Scopus