Computer simulation of point-defect distributions generated by ion implantation
ISSN: 0168-583X
Année de publication: 1993
Volumen: 80-81
Número: PART 1
Pages: 172-175
Type: Article
ISSN: 0168-583X
Année de publication: 1993
Volumen: 80-81
Número: PART 1
Pages: 172-175
Type: Article