Electrical characteristics of anodic tantalum pentoxide thin films under thermal stress

  1. Dueñas, S.
  2. Castán, H.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Revue:
Microelectronics Reliability

ISSN: 0026-2714

Année de publication: 2000

Volumen: 40

Número: 4-5

Pages: 659-662

Type: Article

DOI: 10.1016/S0026-2714(99)00310-8 GOOGLE SCHOLAR
La source de données: Scopus