DLTS and conductance transient investigation on defects in anodic tantalum pentoxide thin films

  1. Dueñas, S.
  2. Castán, H.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Journal:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Year of publication: 2001

Volume: 12

Issue: 4-6

Pages: 317-321

Type: Article

DOI: 10.1023/A:1011292210991 GOOGLE SCHOLAR