DLTS and conductance transient investigation on defects in anodic tantalum pentoxide thin films

  1. Dueñas, S.
  2. Castán, H.
  3. Barbolla, J.
  4. Kola, R.R.
  5. Sullivan, P.A.
Revue:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Année de publication: 2001

Volumen: 12

Número: 4-6

Pages: 317-321

Type: Article

DOI: 10.1023/A:1011292210991 GOOGLE SCHOLAR
La source de données: Scopus