Comparative study on electrical properties of atomic layer deposited high-permittivity materials on silicon substrates

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Barbolla, J.
  5. Kukli, K.
  6. Ritala, M.
  7. Leskelä, M.
Journal:
Thin Solid Films

ISSN: 0040-6090

Year of publication: 2005

Volume: 474

Issue: 1-2

Pages: 222-229

Type: Article

DOI: 10.1016/J.TSF.2004.09.012 GOOGLE SCHOLAR
Data source: Scopus