Modeling and simulation of the influence of SOI structure on damage evolution and ultra-shallow junction formed by Ge preamorphization implants and solid phase epitaxial regrowth

  1. Mok, K.R.C.
  2. Colombeau, B.
  3. Jaraiz, M.
  4. Castrillo, P.
  5. Rubio, J.E.
  6. Pinacho, R.
  7. Srinivasan, M.P.
  8. Benistant, F.
  9. Martin-Bragado, I.
  10. Hamilton, J.J.
Materials Research Society Symposium Proceedings

ISSN: 0272-9172

ISBN: 9781558998681

Year of publication: 2006

Volume: 912

Pages: 99-104

Type: Conference paper

DOI: 10.1557/PROC-0912-C03-04 GOOGLE SCHOLAR