Predictive simulation of advanced nano-CMOS devices based on kMC process simulation

  1. Mok, K.R.C.
  2. Colombeau, B.
  3. Benistant, F.
  4. Teo, R.S.
  5. Yeong, S.H.
  6. Yang, B.
  7. Jaraiz, M.
  8. Chu, S.-F.S.
Revue:
IEEE Transactions on Electron Devices

ISSN: 0018-9383

Année de publication: 2007

Volumen: 54

Número: 9

Pages: 2155-2163

Type: Article

DOI: 10.1109/TED.2007.902698 GOOGLE SCHOLAR

Objetivos de desarrollo sostenible

La source de données: Scopus