Hydrogen-free SiCN films obtained by electron cyclotron resonance plasma
- Hernández, M.J.
- Cervera, M.
- Piqueras, J.
- González, M.A.
- Avella, M.
- Del Caño, T.
- Jiḿnez, J.
Revue:
Journal of the Electrochemical Society
ISSN: 0013-4651
Année de publication: 2007
Volumen: 154
Número: 4
Type: Article
