Atomistic modeling of impurity ion implantation in ultra-thin-body Si devices

  1. Pelaz, L.
  2. Duffy, R.
  3. Aboy, M.
  4. Marques, L.
  5. Lopez, P.
  6. Santos, I.
  7. Pawlak, B.J.
  8. Van Dal, M.J.H.
  9. Duriez, B.
  10. Merelle, T.
  11. Doornbos, G.
  12. Collaert, N.
  13. Witters, L.
  14. Rooyackers, R.
  15. Vandervorst, W.
  16. Jurczak, M.
  17. Kaiser, M.
  18. Weemaes, R.G.R.
  19. Van Berkum, J.G.M.
  20. Breimer, P.
  21. Lander, R.J.P.
Proceedings:
Technical Digest - International Electron Devices Meeting, IEDM

ISSN: 0163-1918

ISBN: 9781424423781

Year of publication: 2008

Type: Conference paper

DOI: 10.1109/IEDM.2008.4796744 GOOGLE SCHOLAR
Data source: Scopus