Process modeling of chemical and stress effects in SiGe
- Zographos, N.
- Zechner, C.
- Castrillo, P.
- Martin-Bragado, I.
ISSN: 0094-243X, 1551-7616
ISBN: 9780735411098
Year of publication: 2012
Volume: 1496
Pages: 212-216
Type: Conference paper
Proceedings:
AIP Conference Proceedings
