Influence of growth and annealing temperatures on the electrical properties of Nb2O5-based MIM capacitors

  1. García, H.
  2. Castán, H.
  3. Perez, E.
  4. Dueñas, S.
  5. Bailón, L.
  6. Blanquart, T.
  7. Niinistö, J.
  8. Kukli, K.
  9. Ritala, M.
  10. Leskelä, M.
Aldizkaria:
Semiconductor Science and Technology

ISSN: 0268-1242 1361-6641

Argitalpen urtea: 2013

Alea: 28

Zenbakia: 5

Mota: Artikulua

DOI: 10.1088/0268-1242/28/5/055005 GOOGLE SCHOLAR

Garapen Iraunkorreko Helburuak