Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing

1. Fisicaro, G.
2. Pelaz, L.
3. Aboy, M.
4. Lopez, P.
5. Italia, M.
6. Huet, K.
7. Cristiano, F.
8. Essa, Z.
9. Yang, Q.
10. Bedel-Pereira, E.
11. Quillec, M.
12. La Magna, A.

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DOI: 10.7567/APEX.7.021301 GOOGLE SCHOLAR lock_openUVADOC editor

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Data source: Scopus