Atomic layer deposition of zirconium dioxide from zirconium tetraiodide and ozone

  1. Kukli, K.
  2. Kemell, M.
  3. Mizohata, K.
  4. Vehkamäki, M.
  5. Kalam, K.
  6. Castán, H.
  7. Duenas, S.
  8. Link, J.
  9. Stern, R.
  10. Ritala, M.
  11. Leskelä, M.
Journal:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8777,  2162-8769

Year of publication: 2018

Volume: 7

Issue: 2

Pages: P1-P8

Type: Article

DOI: 10.1149/2.0041802JSS GOOGLE SCHOLAR
Data source: Scopus