Atomic layer deposition and properties of HFO 2 -Al 2 O 3 nanolaminates

  1. Kukli, K.
  2. Kemell, M.
  3. Castán, H.
  4. Dueñas, S.
  5. Seemen, H.
  6. Rähn, M.
  7. Link, J.
  8. Stern, R.
  9. Ritala, M.
  10. Leskelä, M.
Revue:
ECS Journal of Solid State Science and Technology

ISSN: 2162-8777,  2162-8769

Année de publication: 2018

Volumen: 7

Número: 9

Pages: P501-P508

Type: Article

DOI: 10.1149/2.0261809JSS GOOGLE SCHOLAR lock_openAccès ouvert editor
La source de données: Scopus