Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics
- Graber, T.
- Krasnicki, S.F.
- Fernandez, P.B.
- Mills, D.M.
- Tong, Q.-Y.
- Gösele, U.M.
Proceedings:
Proceedings of SPIE - The International Society for Optical Engineering
ISSN: 0277-786X
Year of publication: 1997
Volume: 3151
Pages: 54-64
Type: Conference paper