Progress in silicon-to-silicon direct bonding and its application to synchrotron x-ray optics

  1. Graber, T.
  2. Krasnicki, S.F.
  3. Fernandez, P.B.
  4. Mills, D.M.
  5. Tong, Q.-Y.
  6. Gösele, U.M.
Actes de conférence:
Proceedings of SPIE - The International Society for Optical Engineering

ISSN: 0277-786X

Année de publication: 1997

Volumen: 3151

Pages: 54-64

Type: Communication dans un congrès

DOI: 10.1117/12.294498 GOOGLE SCHOLAR
La source de données: Scopus