Defects from implantation in silicon by linked Marlow-molecular dynamics calculations

  1. Jaraiz, M.
  2. Gilmer, G.H.
  3. Stock, D.M.
  4. Diaz de la Rubia, T.
Journal:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Year of publication: 1995

Volume: 102

Issue: 1-4

Pages: 180-182

Type: Article

DOI: 10.1016/0168-583X(95)80138-C GOOGLE SCHOLAR
Data source: Scopus