Defects from implantation in silicon by linked Marlow-molecular dynamics calculations

  1. Jaraiz, M.
  2. Gilmer, G.H.
  3. Stock, D.M.
  4. Diaz de la Rubia, T.
Aldizkaria:
Nuclear Inst. and Methods in Physics Research, B

ISSN: 0168-583X

Argitalpen urtea: 1995

Alea: 102

Zenbakia: 1-4

Orrialdeak: 180-182

Mota: Artikulua

DOI: 10.1016/0168-583X(95)80138-C GOOGLE SCHOLAR
Datuen iturria: Scopus