SIMS characterization of the trichloride vapour phase epitaxial growth of III-V compounds

  1. Blanco, J.M.
  2. Lopez, M.
  3. Abril, E.J.
  4. Aguilar, M.
Journal:
Vacuum

ISSN: 0042-207X

Year of publication: 1989

Volume: 39

Issue: 7-8

Pages: 861

Type: Article

DOI: 10.1016/0042-207X(89)90064-X GOOGLE SCHOLAR
Data source: Scopus