SIMS characterization of the trichloride vapour phase epitaxial growth of III-V compounds

  1. Blanco, J.M.
  2. Lopez, M.
  3. Abril, E.J.
  4. Aguilar, M.
Revue:
Vacuum

ISSN: 0042-207X

Année de publication: 1989

Volumen: 39

Número: 7-8

Pages: 861

Type: Article

DOI: 10.1016/0042-207X(89)90064-X GOOGLE SCHOLAR

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