Extending defect models for Si processing: The role of energy barriers for defect transformation, entropy and coalescence mechanism

  1. Santos, I.
  2. Caballo, A.
  3. Aboy, M.
  4. Marqués, L.A.
  5. López, P.
  6. Pelaz, L.
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2022

Volume: 512

Pages: 54-59

Type: Article

DOI: 10.1016/J.NIMB.2021.12.002 GOOGLE SCHOLAR lock_openOpen access editor

Sustainable development goals

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MODELADO ATOMÍSTICO DE LA IRRADIACIÓN DE ALTA ENERGÍA EN SEMICONDUCTORES

2021/00218/001

Data source: Scopus