On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon

  1. Marqués, L.A.
  2. Aboy, M.
  3. Santos, I.
  4. López, P.
  5. Cristiano, F.
  6. La Magna, A.
  7. Huet, K.
  8. Tabata, T.
  9. Pelaz, L.
Zeitschrift:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Datum der Publikation: 2019

Ausgabe: 458

Seiten: 179-183

Art: Artikel

DOI: 10.1016/J.NIMB.2018.09.030 GOOGLE SCHOLAR lock_openUVADOC editor