On the anomalous generation of {0 0 1} loops during laser annealing of ion-implanted silicon
- Marqués, L.A.
- Aboy, M.
- Santos, I.
- López, P.
- Cristiano, F.
- La Magna, A.
- Huet, K.
- Tabata, T.
- Pelaz, L.
Zeitschrift:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms
ISSN: 0168-583X
Datum der Publikation: 2019
Ausgabe: 458
Seiten: 179-183
Art: Artikel