Publications by the researcher in collaboration with G. Hobler (4)

2000

  1. Dose, energy, and ion species dependence of the effective plus factor for transient enhanced diffusion

    Journal of the Electrochemical Society, Vol. 147, Núm. 9, pp. 3494-3501

  2. Use of transient enhanced diffusion to tailor boron out-diffusion

    IEEE Transactions on Electron Devices, Vol. 47, Núm. 7, pp. 1401-1405

1999

  1. Continuum treatment of spatial correlation in damage annealing

    Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, Vol. 153, Núm. 1-4, pp. 172-176

1998

  1. Modeling of the ion mass effect on transient enhanced diffusion: Deviation from the "+1" model

    Applied Physics Letters, Vol. 73, Núm. 10, pp. 1421-1423