MARIA
ABOY CEBRIAN
PROFESORES TITULARES DE UNIVERSIDAD
Laboratory for Analysis and Architecture of Systems
Tolosa, FranciaPublications en collaboration avec des chercheurs de Laboratory for Analysis and Architecture of Systems (2)
2014
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Kinetic Monte Carlo simulations of boron activation in implanted Si under laser thermal annealing
Applied Physics Express, Vol. 7, Núm. 2
2013
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Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD