MARIA
ABOY CEBRIAN
PROFESORES TITULARES DE UNIVERSIDAD
Fraunhofer Institute for Integrated Systems and Device Technology
Erlangen, AlemaniaPublicacions en col·laboració amb investigadors/es de Fraunhofer Institute for Integrated Systems and Device Technology (1)
2013
-
Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD