MARIA
ABOY CEBRIAN
PROFESORES TITULARES DE UNIVERSIDAD
Fraunhofer Institute for Integrated Systems and Device Technology
Erlangen, AlemaniaPublikationen in Zusammenarbeit mit Forschern von Fraunhofer Institute for Integrated Systems and Device Technology (1)
2013
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Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach
International Conference on Simulation of Semiconductor Processes and Devices, SISPAD