Publications in collaboration with researchers from STMicroelectronics (2)

2008

  1. The role of implanter parameters on implant damage generation: An atomistic simulation study

    AIP Conference Proceedings

2007

  1. Atomistic modeling and physical comprehension of the effects of implant dose rate on boron activation in pMOSFET S/D

    ESSDERC 2007 - Proceedings of the 37th European Solid-State Device Research Conference