Publikationen in Zusammenarbeit mit Forschern von Fraunhofer Institute for Integrated Systems and Device Technology (2)

2013

  1. Dopant dynamics and defects evolution in implanted silicon under laser irradiations: A coupled continuum and kinetic Monte Carlo approach

    International Conference on Simulation of Semiconductor Processes and Devices, SISPAD

2008

  1. Angular distributions of sputtered atoms from semiconductor targets at grazing ion beam incidence angles

    AIP Conference Proceedings