C-V, DLTS and conductance transient characterization of SiNx: H/InP interface improved by N2 remote plasma cleaning of the InP surface

  1. Castán, H.
  2. Dueñas, S.
  3. Barbolla, J.
  4. Redondo, E.
  5. Mártil, I.
  6. González-Díaz, G.
Journal:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Year of publication: 2001

Volume: 12

Issue: 4-6

Pages: 263-267

Type: Article

DOI: 10.1023/A:1011219622378 GOOGLE SCHOLAR
Data source: Scopus