C-V, DLTS and conductance transient characterization of SiNx: H/InP interface improved by N2 remote plasma cleaning of the InP surface

  1. Castán, H.
  2. Dueñas, S.
  3. Barbolla, J.
  4. Redondo, E.
  5. Mártil, I.
  6. González-Díaz, G.
Revue:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Année de publication: 2001

Volumen: 12

Número: 4-6

Pages: 263-267

Type: Article

DOI: 10.1023/A:1011219622378 GOOGLE SCHOLAR
La source de données: Scopus