C-V, DLTS and conductance transient characterization of SiNx: H/InP interface improved by N2 remote plasma cleaning of the InP surface

  1. Castán, H.
  2. Dueñas, S.
  3. Barbolla, J.
  4. Redondo, E.
  5. Mártil, I.
  6. González-Díaz, G.
Aldizkaria:
Journal of Materials Science: Materials in Electronics

ISSN: 0957-4522

Argitalpen urtea: 2001

Alea: 12

Zenbakia: 4-6

Orrialdeak: 263-267

Mota: Artikulua

DOI: 10.1023/A:1011219622378 GOOGLE SCHOLAR
Datuen iturria: Scopus