Raman-scattering assessment of Si+-implantation damage in InP

  1. Cuscó, R.
  2. Talamàs, G.
  3. Artús, L.
  4. Martin, J.M.
  5. González-Díaz, G.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 1996

Volume: 79

Issue: 8

Pages: 3927-3929

Type: Article

DOI: 10.1063/1.361819 GOOGLE SCHOLAR
Data source: Scopus