Characterization of Si implantation and annealing of InP by Raman spectroscopy
- Artus, L.
- Cusco, R.
- Martin, J.M.
- Gonzalez-Diaz, G.
Proceedings:
Materials Research Society Symposium - Proceedings
ISSN: 0272-9172
Year of publication: 1995
Volume: 354
Pages: 213-217
Type: Conference paper