Characterization of Si implantation and annealing of InP by Raman spectroscopy
- Artus, L.
- Cusco, R.
- Martin, J.M.
- Gonzalez-Diaz, G.
ISSN: 0272-9172
Année de publication: 1995
Volumen: 354
Pages: 213-217
Type: Communication dans un congrès
Actes de conférence:
Materials Research Society Symposium - Proceedings