Molecular dynamics simulation of amorphous silicon sputtering by Ar+ ions
ISSN: 0168-583X
Year of publication: 1995
Volume: 102
Issue: 1-4
Pages: 301-304
Type: Article
ISSN: 0168-583X
Year of publication: 1995
Volume: 102
Issue: 1-4
Pages: 301-304
Type: Article