Molecular dynamics study of the fluence dependence of Si sputtering by 1 keV Ar+ ions
ISSN: 0168-583X
Year of publication: 1996
Volume: 112
Issue: 1-4
Pages: 156-159
Type: Article
ISSN: 0168-583X
Year of publication: 1996
Volume: 112
Issue: 1-4
Pages: 156-159
Type: Article