Molecular dynamics study of the fluence dependence of Si sputtering by 1 keV Ar+ ions

  1. Rubio, J.E.
  2. Marqués, L.A.
  3. Pelaz, L.
  4. Jaraíz, M.
  5. Barbolla, J.
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 1996

Alea: 112

Zenbakia: 1-4

Orrialdeak: 156-159

Mota: Artikulua

DOI: 10.1016/0168-583X(95)01140-4 GOOGLE SCHOLAR
Datuen iturria: Scopus