Molecular dynamics study of the fluence dependence of Si sputtering by 1 keV Ar+ ions

  1. Rubio, J.E.
  2. Marqués, L.A.
  3. Pelaz, L.
  4. Jaraíz, M.
  5. Barbolla, J.
Revue:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Année de publication: 1996

Volumen: 112

Número: 1-4

Pages: 156-159

Type: Article

DOI: 10.1016/0168-583X(95)01140-4 GOOGLE SCHOLAR
La source de données: Scopus