Improved binary collision approximation ion implant simulators

  1. Hernández-Mangas, J.M.
  2. Arias, J.
  3. Bailón, L.
  4. Jaraíz, M.
  5. Barbolla, J.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2002

Volume: 91

Issue: 2

Pages: 658-667

Type: Article

DOI: 10.1063/1.1424052 GOOGLE SCHOLAR
Data source: Scopus