The role of silicon interstitials in the deactivation and reactivation of high concentration boron profiles

  1. Aboy, M.
  2. Pelaz, L.
  3. Marqués, L.A.
  4. Löpez, P.
  5. Barbolla, J.
  6. Venezia, V.C.
  7. Duffy, R.
  8. Griffin, P.B.
Aldizkaria:
Materials Science and Engineering B: Solid-State Materials for Advanced Technology

ISSN: 0921-5107

Argitalpen urtea: 2004

Alea: 114-115

Zenbakia: SPEC. ISS.

Orrialdeak: 193-197

Mota: Biltzar ekarpena

DOI: 10.1016/J.MSEB.2004.07.056 GOOGLE SCHOLAR
Datuen iturria: Scopus