Ion-beam-induced amorphization and recrystallization in silicon

  1. Pelaz, L.
  2. Marqús, L.A.
  3. Barbolla, J.
Journal:
Journal of Applied Physics

ISSN: 0021-8979

Year of publication: 2004

Volume: 96

Issue: 11

Pages: 5947-5976

Type: Article

DOI: 10.1063/1.1808484 GOOGLE SCHOLAR
Data source: Scopus