Boron diffusion in amorphous silicon and the role of fluorine
- Duffy, R.
- Venezia, V.C.
- Heringa, A.
- Pawlak, B.J.
- Hopstaken, M.J.P.
- Maas, G.C.J.
- Tamminga, Y.
- Dao, T.
- Roozeboom, F.
- Pelaz, L.
ISSN: 0003-6951
Year of publication: 2004
Volume: 84
Issue: 21
Pages: 4283-4285
Type: Article