Comprehensive modeling of ion-implant amorphization in silicon
- Mok, K.R.C.
- Jaraiz, M.
- Martin-Bragado, I.
- Rubio, J.E.
- Castrillo, P.
- Pinacho, R.
- Srinivasan, M.P.
- Benistant, F.
ISSN: 0921-5107
Year of publication: 2005
Volume: 124-125
Issue: SUPPL.
Pages: 383-385
Type: Conference paper