Physical insight into ultra-shallow junction formation through atomistic modeling

  1. Aboy, M.
  2. Lopez, P.
  3. Marques, L.A.
  4. Santos, I.
  5. L. Pelaz
Journal:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Year of publication: 2006

Volume: 253

Issue: 1-2

Pages: 41-45

Type: Article

DOI: 10.1016/J.NIMB.2006.10.036 GOOGLE SCHOLAR
Data source: Scopus