Physical insight into ultra-shallow junction formation through atomistic modeling

  1. Aboy, M.
  2. Lopez, P.
  3. Marques, L.A.
  4. Santos, I.
  5. L. Pelaz
Aldizkaria:
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

ISSN: 0168-583X

Argitalpen urtea: 2006

Alea: 253

Zenbakia: 1-2

Orrialdeak: 41-45

Mota: Artikulua

DOI: 10.1016/J.NIMB.2006.10.036 GOOGLE SCHOLAR
Datuen iturria: Scopus