Electrical properties of atomic-layer-deposited thin gadolinium oxide high- k gate dielectrics

  1. Dueñas, S.
  2. Castán, H.
  3. García, H.
  4. Gómez, A.
  5. Bailón, L.
  6. Kukli, K.
  7. Hatanpää, T.
  8. Lu, J.
  9. Ritala, M.
  10. Leskelä, M.
Journal:
Journal of the Electrochemical Society

ISSN: 0013-4651

Year of publication: 2007

Volume: 154

Issue: 10

Type: Article

DOI: 10.1149/1.2761845 GOOGLE SCHOLAR

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