Electrical properties of atomic-layer-deposited thin gadolinium oxide high- k gate dielectrics
- Dueñas, S.
- Castán, H.
- García, H.
- Gómez, A.
- Bailón, L.
- Kukli, K.
- Hatanpää, T.
- Lu, J.
- Ritala, M.
- Leskelä, M.
Journal:
Journal of the Electrochemical Society
ISSN: 0013-4651
Year of publication: 2007
Volume: 154
Issue: 10
Type: Article